GENTEC U53SL Ultra High Purity Regulator

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SKU: U53SL Categories: , , , , ,

Description

U53SL Series Ultra High Purity Single Stage Low Flow Regulator

 

GENTEC U53SL Ultra High Purity Regulator is a threadless, high purity Regulator with non-tied diaphragm design. GENTEC U53SL Ultra High Purity Regulator metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

 

Features:

  • Single-Stage Configuration
  • Metal-to-Metal Seal
  • 2” Pressure Gauge 
  • Fully Internal Electropolished
  • Cleaned, Assembled, and Packaged for High Purity Semiconductor Application
  • Maximum inlet pressure: 300 psig
  • Maximum outlet pressure: 30 psig
  • Safety test pressure: 1.5 x Maximum inlet pressure
  • Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)
  • Inboard leakage: 0.5 x 10-9 atm cc/sec He
  • Outboard leakage: 1 x 10-9 atm cc/sec He
  • Leakage across seat: 4 x 10-8 atm cc/sec He
  • Maximum Cv: 0.054
  • Weight: 3.8 lb

 

Applications:

  • Semiconductor
  • Solar
  • Gas Panels
  • OEM

 

Model:

EX: U53SL

G

K –

G

L

K –

91 – 91 – 

Options

Series

Ports

Seat

Inlet Pressure Range

Outlet Pressure Range

Gauge

Inlet / Outlet Connections

P: Panel Mounting

U53SL

A

K: PCTFE

G: 300 psi

L: 0-30 psig

K: Gauge

90: 1/4” internal female FSR

H: Hastelloy® Diaphragm

B

W: No Gauge

91: 1/4” swivel female FSR

G

92: 1/4” swivel male FSR

41: 1/4” weld stub

 

 

 

Additional information

Weight 3 kg
Series

U53SL
Ports

A, B, G
Seat

K
Inlet Pressure

G
Outlet Pressure 

L
Gauge

K, W
Inlet / Outlet Connections

41, 92, 91, 92
Options

H, P

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