GENTEC U53SL Ultra High Purity Regulator
RM 0.00
Description
U53SL Series Ultra High Purity Single Stage Low Flow Regulator
GENTEC U53SL Ultra High Purity Regulator is a threadless, high purity Regulator with non-tied diaphragm design. GENTEC U53SL Ultra High Purity Regulator metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
Features:
- Single-Stage Configuration
- Metal-to-Metal Seal
- 2” Pressure Gauge
- Fully Internal Electropolished
- Cleaned, Assembled, and Packaged for High Purity Semiconductor Application
- Maximum inlet pressure: 300 psig
- Maximum outlet pressure: 30 psig
- Safety test pressure: 1.5 x Maximum inlet pressure
- Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)
- Inboard leakage: 0.5 x 10-9 atm cc/sec He
- Outboard leakage: 1 x 10-9 atm cc/sec He
- Leakage across seat: 4 x 10-8 atm cc/sec He
- Maximum Cv: 0.054
- Weight: 3.8 lb
Applications:
- Semiconductor
- Solar
- Gas Panels
- OEM
Model:
|
EX: U53SL |
G |
K – |
G |
L |
K – |
91 – 91 – |
Options |
|
Series |
Ports |
Seat |
Inlet Pressure Range |
Outlet Pressure Range |
Gauge |
Inlet / Outlet Connections |
P: Panel Mounting |
|
U53SL |
A |
K: PCTFE |
G: 300 psi |
L: 0-30 psig |
K: Gauge |
90: 1/4” internal female FSR |
H: Hastelloy® Diaphragm |
|
B |
W: No Gauge |
91: 1/4” swivel female FSR |
|||||
|
G |
92: 1/4” swivel male FSR |
||||||
|
41: 1/4” weld stub |
Additional information
| Weight | 3 kg |
|---|---|
| Series | U53SL |
| Ports | A, B, G |
| Seat | K |
| Inlet Pressure | G |
| Outlet Pressure | L |
| Gauge | K, W |
| Inlet / Outlet Connections | 41, 92, 91, 92 |
| Options | H, P |
