GENTEC U22SL Ultra High Purity Regulator

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SKU: U22SL Categories: , , , , ,

Description

U22SL Series Ultra High Purity Single Stage Medium Flow Regulator

 

GENTEC U22SL Ultra High Purity Regulator is a purge gas, pressure reducing regulators. GENTEC U22SL Ultra High Purity Regulator is designed for non-corrosive, corrosive, and toxic gas applications. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

 

Features:

  • Single-Stage Configuration
  • Metal-to-Metal Seal 
  • 2” Pressure Gauge  
  • Fully Internal Electropolished
  • Cleaned, Assembled, and Packaged for High Purity 
  • Semiconductor Application  
  • 100% Helium-leak tested
  • Maximum inlet pressure: 500 psig (35 bar for B Port), 3000 psig (206 bar for A   and G Port)
  • Maximum outlet pressure: 250 psig
  • Safety test pressure: 1.5 x Maximum inlet pressure
  • Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)
  • Inboard leakage: 2 x 10-8 atm cc/sec He
  • Outboard leakage: 2 x 10-9 atm cc/sec He
  • Leakage across seat: 4 x 10-8 atm cc/sec He 
  • Maximum Cv: 1.1
  • Weight: 3.8 lb

Application:

  • Semiconductor
  • Solar
  • Gas Panels
  • OEM

Model:

EX: U22SL

G

K –

D

G

K –

95 – 95 – 

P

Series

Ports

Seat

Inlet Pressure Ranges

Outlet Pressure Ranges

Gauge

Inlet / Outlet Connections

Options

U22SL

A

K: PCTFE

D: 3000 psig

G: 0-250 psig

K: psig/kPa

95: 1/2” FSR(F)

E: Ra 10 µin

B

F: 500 psig

H: 0-150 psig

P: psig/bar

96: 1/2” FSR(M)

P: Panel Mounting

G

I: 0-100 psig

 W: No Gauge

H: Hastelloy® Diaphragm

K: 0-50 psig

L: 0-25 psig

 

 

 

 

Additional information

Weight 3 kg
Series

U22SL
Ports

A, B, G
Seat

K
Inlet Pressure

D, F
Outlet Pressure

G, H, I, K, L
Gauge

K, P, W
Inlet / Outlet Connections

95, 96
Options

E, H, P

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