GENTEC U21SL Ultra High Purity Regulator
RM 0.00
Description
U21SL Series Ultra High Purity Single Stage Low Flow Regulator
GENTEC U21SL Ultra High Purity Regulator is a hand adjustable, pressure reducing regulator designed for non-corrosive, corrosive, and toxic gas applications. GENTEC U21SL Ultra High Purity Regulator metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
Features
- Single-Stage Configuration
- Metal-to-Metal Seal
- 2” Pressure Gauge
- Fully Internal Electropolished
- Cleaned, Assembled, and Packaged for High Purity
- Semiconductor Application
- 100% Helium-leak tested
- Maximum inlet pressure: 500 psig (35 bar for B Port), 3000 psig (206 bar for A and G Port)
- Maximum outlet pressure: 500 psig
- Safety test pressure: 1.5 x Maximum inlet pressure
- Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)
- Inboard leakage: 2 x 10-8 atm cc/sec He
- Outboard leakage: 2 x 10-9 atm cc/sec He
- Leakage across seat: 4 x 10-8 atm cc/sec He
- Maximum Cv: 0.14
- Weight: 3.8 lb
Materials
Model
|
EX: U21SL |
G |
K – |
D |
G |
K |
91 – 91 – |
P |
|
Series |
Ports |
Seat |
Inlet Pressure Ranges |
Outlet Pressure Ranges |
Gauge |
Inlet / Outlet Connections |
Options |
|
U21SL |
A |
K: PCTFE |
D: 3000 psig |
F: 0-500 psig |
K: psig/kPa |
90: 1/4” internal female FSR |
E: Ra 10 µin |
|
B |
F: 500 psig |
G: 0-250 psig |
P: psig/bar |
91: 1/4” swivel female FSR |
P: Panel Mounting |
||
|
G |
I: 0-100 psig |
W: No Gauge |
92: 1/4” swivel male FSR |
H: Hastelloy® Diaphragm |
|||
|
K: 0-50 psig |
41: 1/4” weld stub |
||||||
|
L: 0-25 psig |
Additional information
| Weight | 3 kg |
|---|---|
| Series | U21SL |
| Ports | A, B, G |
| Seat | K |
| Inlet Pressure | D, F |
| Outlet Pressure | F, G, I, K, L |
| Gauge | K, P, W |
| Inlet/Outlet Connection | 41-41, 90-90, 91-91, 92-92 |
| Option | E, P, H |
