GENTEC – Ultra High Purity Single Stage Low Flow Regulator U21SL Series

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Description

Ultra High Purity Single Stage Low Flow Regulator
U21SL Series

GENTEC® U21SL Series Single-Stage Stainless Steel Regulator is a hand adjustable, pressure reducing regulator designed for non-corrosive, corrosive, and toxic gas applications. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

Features

• Single-Stage Configuration

• Metal-to-Metal Seal 

• 2” Pressure Gauge 

• Fully Internal Electropolished

• Cleaned, Assembled, and Packaged for High Purity 

  Semiconductor Application  

• 100% Helium-leak tested

 

Specifications

• Maximum inlet pressure: 500 psig (35 bar for B Port), 3000 psig (206 bar for A and G Port)

• Maximum outlet pressure: 500 psig

• Safety test pressure: 1.5 x Maximum inlet pressure

• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)

• Inboard leakage: 2 x 10-8 atm cc/sec He

• Outboard leakage: 2 x 10-9 atm cc/sec He

• Leakage across seat: 4 x 10-8 atm cc/sec He

• Maximum Cv: 0.14

• Weight: 3.8 lb

 

Materials

• Body: 316L Stainless Steel

• Poppet: 316L Stainless Steel

• Seat: PCTFE

• Diaphragm: 316L Stainless Steel

• Adjusting Knob: ABS Plastic

 

Model

EX: U21SL

G

K –

D

G

91 – 91 –

P

Series

Ports

Seat

Inlet Pressure Ranges 

Outlet Pressure Ranges

Gauge

Inlet / Outlet Connections

Options

U21SL

A

K: PCTFE

D: 3000 psig

F: 0-500 psig

K: psig/kPa

90: 1/4” internal female FSR

E: Ra 10 µin

B

F: 500 psig

G: 0-250 psig

P: psig/bar 

91: 1/4” swivel female FSR

P: Panel Mounting

G

I: 0-100 psig

W: No Gauge

92: 1/4” swivel male FSR

H: Hastelloy® Diaphragm

K: 0-50 psig

41: 1/4” weld stub

L: 0-25 psig

U21SLAK-DFP-41E

U21SLAK-DFP-41P

U21SLAK-DFP-41H

U21SLAK-DFP-91E

U21SLAK-DFP-91P

U21SLAK-DFP-91H

U21SLAK-DFP-92E

U21SLAK-DFP-92P

U21SLAK-DFP-92H

 

U21SLAK-DFW-41E

U21SLAK-DFW-41P

U21SLAK-DFW-41H

U21SLAK-DFW-91E

U21SLAK-DFW-91P

U21SLAK-DFW-91H

U21SLAK-DFW-92E

U21SLAK-DFW-92P

U21SLAK-DFW-92H

 

U21SLAK-DGW-41E

U21SLAK-DGW-41P

U21SLAK-DGW-41H

U21SLAK-DGW-91E

U21SLAK-DGW-91P

U21SLAK-DGW-91H

U21SLAK-DGW-92E

U21SLAK-DGW-92P

U21SLAK-DGW-92H

 

U21SLAK-DIW-41E

U21SLAK-DIW-41P

U21SLAK-DIW-41H

U21SLAK-DIW-91E

U21SLAK-DIW-91P

U21SLAK-DIW-91H

U21SLAK-DIW-92E

U21SLAK-DIW-92P

U21SLAK-DIW-92H

 

U21SLAV-DFW-41E

U21SLAV-DFW-41P

U21SLAV-DFW-41H

U21SLAV-DFW-91E

U21SLAV-DFW-91P

U21SLAV-DFW-91H

U21SLAV-DFW-92E

U21SLAV-DFW-92P

U21SLAV-DFW-92H

 

U21SLAV-DKW-41E

U21SLAV-DKW-41P

U21SLAV-DKW-41H

U21SLAV-DKW-91E

U21SLAV-DKW-91P

U21SLAV-DKW-91H

U21SLAV-DKW-92E

U21SLAV-DKW-92P

U21SLAV-DKW-92H

 

U21SLAV-DLW-41E

U21SLAV-DLW-41P

U21SLAV-DLW-41H

U21SLAV-DLW-91E

U21SLAV-DLW-91P

U21SLAV-DLW-91H

U21SLAV-DLW-92E

U21SLAV-DLW-92P

U21SLAV-DLW-92H

 

U21SLAV-FFW-41E

U21SLAV-FFW-41P

U21SLAV-FFW-41H

U21SLAV-FFW-91E

U21SLAV-FFW-91P

U21SLAV-FFW-91H

U21SLAV-FFW-92E

U21SLAV-FFW-92P

U21SLAV-FFW-92H

 

U21SLAV-FGW-91E

U21SLAV-FGW-91P

U21SLAV-FGW-91H

U21SLAV-FGW-92E

U21SLAV-FGW-92P

U21SLAV-FGW-92H

 

U21SLBK-FIW-41E

U21SLBK-FIW-41P

U21SLBK-FIW-41H

U21SLBK-FIW-91E

U21SLBK-FIW-91P

U21SLBK-FIW-91H

U21SLBK-FIW-92E

U21SLBK-FIW-92P

U21SLBK-FIW-92H

 

U21SLBK-FKW-91E

U21SLBK-FKW-91P

U21SLBK-FKW-91H

U21SLBK-FKW-92E

U21SLBK-FKW-92P

U21SLBK-FKW-92H

 

U21SLGK-DIW-41E

U21SLGK-DIW-41P

U21SLGK-DIW-41H

U21SLGK-DIW-91E

U21SLGK-DIW-91P

U21SLGK-DIW-91H

U21SLGK-DIW-92E

U21SLGK-DIW-92P

U21SLGK-DIW-92H

 

U21SLGV-DFW-41E

U21SLGV-DFW-41P

U21SLGV-DFW-41H

U21SLGV-DFW-91E

U21SLGV-DFW-91P

U21SLGV-DFW-91H

U21SLGV-DFW-92E

U21SLGV-DFW-92P

U21SLGV-DFW-92H

 

U21SLGV-DLP-41E

U21SLGV-DLP-41P

U21SLGV-DLP-41H

U21SLGV-DLP-91E

U21SLGV-DLP-91P

U21SLGV-DLP-91H

U21SLGV-DLP-92E

U21SLGV-DLP-92P

U21SLGV-DLP-92H

 

U21SLGV-DLW-41E

U21SLGV-DLW-41P

U21SLGV-DLW-41H

U21SLGV-DLW-91E

U21SLGV-DLW-91P

U21SLGV-DLW-91H

U21SLGV-DLW-92E

U21SLGV-DLW-92P

U21SLGV-DLW-92H

 

U21SLGV-FFP-41E

U21SLGV-FFP-41P

U21SLGV-FFP-41H

U21SLGV-FFP-91E

U21SLGV-FFP-91P

U21SLGV-FFP-91H

U21SLGV-FFP-92E

U21SLGV-FFP-92P

U21SLGV-FFP-92H

 

U21SLGV-FFW-41E

U21SLGV-FFW-41P

U21SLGV-FFW-41H

U21SLGV-FFW-91E

U21SLGV-FFW-91P

U21SLGV-FFW-91H

U21SLGV-FFW-92E

U21SLGV-FFW-92P

U21SLGV-FFW-92H

 

U21SLGV-FGW-41E

U21SLGV-FGW-41P

U21SLGV-FGW-41H

U21SLGV-FGW-91E

U21SLGV-FGW-91P

U21SLGV-FGW-91H

U21SLGV-FGW-92E

U21SLGV-FGW-92P

U21SLGV-FGW-92H

 

U21SLJK-FIW-41E

U21SLJK-FIW-41P

U21SLJK-FIW-41H

U21SLJK-FIW-91E

U21SLJK-FIW-91P

U21SLJK-FIW-91H

U21SLJK-FIW-92E

U21SLJK-FIW-92P

U21SLJK-FIW-92H

 

U21SLJK-FKW-41E

U21SLJK-FKW-41P

U21SLJK-FKW-41H

U21SLJK-FKW-91E

U21SLJK-FKW-91P

U21SLJK-FKW-91H

U21SLJK-FKW-92E

U21SLJK-FKW-92P

U21SLJK-FKW-92H

 

U21SLMK-DFW-41E

U21SLMK-DFW-41P

U21SLMK-DFW-41H

U21SLMK-DFW-91E

U21SLMK-DFW-91P

U21SLMK-DFW-91H

U21SLMK-DFW-92E

U21SLMK-DFW-92P

U21SLMK-DFW-92H

 

U21SLMK-FKW-41E

U21SLMK-FKW-41P

U21SLMK-FKW-41H

U21SLMK-FKW-91E

U21SLMK-FKW-91P

U21SLMK-FKW-91H

U21SLMK-FKW-92E

U21SLMK-FKW-92P

U21SLMK-FKW-92H

 

U21SLMK-FLW-41E

U21SLMK-FLW-41P

U21SLMK-FLW-41H

U21SLMK-FLW-91E

U21SLMK-FLW-91P

U21SLMK-FLW-91H

U21SLMK-FLW-92E

U21SLMK-FLW-92P

U21SLMK-FLW-92H

 

 

Additional information

Weight 3 kg
Model

U21SLAK-DFP-41E, U21SLAK-DFP-41P, U21SLAK-DFP-41H, U21SLAK-DFP-91E, U21SLAK-DFP-91P, U21SLAK-DFP-91H, U21SLAK-DFP-92E, U21SLAK-DFP-92P, U21SLAK-DFP-92H, U21SLAK-DFW-41E, U21SLAK-DFW-41P, U21SLAK-DFW-41H, U21SLAK-DFW-91E, U21SLAK-DFW-91P, U21SLAK-DFW-91H, U21SLAK-DFW-92E, U21SLAK-DFW-92P, U21SLAK-DFW-92H, U21SLAK-DGW-41E, U21SLAK-DGW-41P, U21SLAK-DGW-41H, U21SLAK-DGW-91E, U21SLAK-DGW-91P, U21SLAK-DGW-91H, U21SLAK-DGW-92E, U21SLAK-DGW-92P, U21SLAK-DGW-92H, U21SLAK-DIW-41E, U21SLAK-DIW-41P, U21SLAK-DIW-41H, U21SLAK-DIW-91E, U21SLAK-DIW-91P, U21SLAK-DIW-91H, U21SLAK-DIW-92E, U21SLAK-DIW-92P, U21SLAK-DIW-92H, U21SLAV-DFW-41E, U21SLAV-DFW-41P, U21SLAV-DFW-41H, U21SLAV-DFW-91E, U21SLAV-DFW-91P, U21SLAV-DFW-91H, U21SLAV-DFW-92E, U21SLAV-DFW-92P, U21SLAV-DFW-92H, U21SLAV-DKW-41E, U21SLAV-DKW-41P, U21SLAV-DKW-41H, U21SLAV-DKW-91E, U21SLAV-DKW-91P, U21SLAV-DKW-91H, U21SLAV-DKW-92E, U21SLAV-DKW-92P, U21SLAV-DKW-92H, U21SLAV-DLW-41E, U21SLAV-DLW-41P, U21SLAV-DLW-41H, U21SLAV-DLW-91E, U21SLAV-DLW-91P, U21SLAV-DLW-91H, U21SLAV-DLW-92E, U21SLAV-DLW-92P, U21SLAV-DLW-92H, U21SLAV-FFW-41E, U21SLAV-FFW-41P, U21SLAV-FFW-41H, U21SLAV-FFW-91E, U21SLAV-FFW-91P, U21SLAV-FFW-91H, U21SLAV-FFW-92E, U21SLAV-FFW-92P, U21SLAV-FFW-92H, U21SLAV-FGW-91E, U21SLAV-FGW-91P, U21SLAV-FGW-91H, U21SLAV-FGW-92E, U21SLAV-FGW-92P, U21SLAV-FGW-92H, U21SLBK-FIW-41E, U21SLBK-FIW-41P, U21SLBK-FIW-41H, U21SLBK-FIW-91E, U21SLBK-FIW-91P, U21SLBK-FIW-91H, U21SLBK-FIW-92E, U21SLBK-FIW-92P, U21SLBK-FIW-92H, U21SLBK-FKW-91E, U21SLBK-FKW-91P, U21SLBK-FKW-91H, U21SLBK-FKW-92E, U21SLBK-FKW-92P, U21SLBK-FKW-92H, U21SLGK-DIW-41E, U21SLGK-DIW-41P, U21SLGK-DIW-41H, U21SLGK-DIW-91E, U21SLGK-DIW-91P, U21SLGK-DIW-91H, U21SLGK-DIW-92E, U21SLGK-DIW-92P, U21SLGK-DIW-92H, U21SLGV-DFW-41E, U21SLGV-DFW-41P, U21SLGV-DFW-41H, U21SLGV-DFW-91E, U21SLGV-DFW-91P, U21SLGV-DFW-91H, U21SLGV-DFW-92E, U21SLGV-DFW-92P, U21SLGV-DFW-92H, U21SLGV-DLP-41E, U21SLGV-DLP-41P, U21SLGV-DLP-41H, U21SLGV-DLP-91E, U21SLGV-DLP-91P, U21SLGV-DLP-91H, U21SLGV-DLP-92E, U21SLGV-DLP-92P, U21SLGV-DLP-92H, U21SLGV-DLW-41E, U21SLGV-DLW-41P, U21SLGV-DLW-41H, U21SLGV-DLW-91E, U21SLGV-DLW-91P, U21SLGV-DLW-91H, U21SLGV-DLW-92E, U21SLGV-DLW-92P, U21SLGV-DLW-92H, U21SLGV-FFP-41E, U21SLGV-FFP-41P, U21SLGV-FFP-41H, U21SLGV-FFP-91E, U21SLGV-FFP-91P, U21SLGV-FFP-91H, U21SLGV-FFP-92E, U21SLGV-FFP-92P, U21SLGV-FFP-92H, U21SLGV-FFW-41E, U21SLGV-FFW-41P, U21SLGV-FFW-41H, U21SLGV-FFW-91E, U21SLGV-FFW-91P, U21SLGV-FFW-91H, U21SLGV-FFW-92E, U21SLGV-FFW-92P, U21SLGV-FFW-92H, U21SLGV-FGW-41E, U21SLGV-FGW-41P, U21SLGV-FGW-41H, U21SLGV-FGW-91E, U21SLGV-FGW-91P, U21SLGV-FGW-91H, U21SLGV-FGW-92E, U21SLGV-FGW-92P, U21SLGV-FGW-92H, U21SLJK-FIW-41E, U21SLJK-FIW-41P, U21SLJK-FIW-41H, U21SLJK-FIW-91E, U21SLJK-FIW-91P, U21SLJK-FIW-91H, U21SLJK-FIW-92E, U21SLJK-FIW-92P, U21SLJK-FIW-92H, U21SLJK-FKW-41E, U21SLJK-FKW-41P, U21SLJK-FKW-41H, U21SLJK-FKW-91E, U21SLJK-FKW-91P, U21SLJK-FKW-91H, U21SLJK-FKW-92E, U21SLJK-FKW-92P, U21SLJK-FKW-92H, U21SLMK-DFW-41E, U21SLMK-DFW-41P, U21SLMK-DFW-41H, U21SLMK-DFW-91E, U21SLMK-DFW-91P, U21SLMK-DFW-91H, U21SLMK-DFW-92E, U21SLMK-DFW-92P, U21SLMK-DFW-92H, U21SLMK-FKW-41E, U21SLMK-FKW-41P, U21SLMK-FKW-41H, U21SLMK-FKW-91E, U21SLMK-FKW-91P, U21SLMK-FKW-91H, U21SLMK-FKW-92E, U21SLMK-FKW-92P, U21SLMK-FKW-92H, U21SLMK-FLW-41E, U21SLMK-FLW-41P, U21SLMK-FLW-41H, U21SLMK-FLW-91E, U21SLMK-FLW-91P, U21SLMK-FLW-91H, U21SLMK-FLW-92E, U21SLMK-FLW-92P, U21SLMK-FLW-92H

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