Description

DFC digital mass flow controller

DFC programmable thermal mass flow controller with digital signal processing

Design Features

• digital and analog modes operate
• programmable flow configurations
• available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
• maximum pressure of 1000 psig (70 bars)
• multi-drop capability of up to 256 units
• stores calibration data for up to 10 gases
• totalizer indicates total gas quantity
• alarm limits for high and low gas flow
• conversion factors for up to 256 gases
• auto tune function for optimum control response
• self diagnostic tests