Description

AFC analog mass flow controller

AFC analog thermal mass flow controllers

Design Features

• rigid metallic construction
• available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
• maximum pressure of 1000 psig (70 bars)
• 0-5 Vdc or 4-20 mA signals
• leak integrity 1 x 10^-9 smL/sec of helium
• accuracy of ±1% full scale
• totalizer option
• circuit protection