GENTEC – Ultra High Purity Single Stage Low Flow Regulator U53SL Series
RM 0.00
Description
GENTEC® U53SL Series Stainless Steel Regulator is a threadless, high purity Regulator with non-tied diaphragm design. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
Features
• Single-Stage Configuration
• Metal-to-Metal Seal
• 2” Pressure Gauge
• Fully Internal Electropolished
• Cleaned, Assembled, and Packaged for High Purity Semiconductor Application
• Maximum inlet pressure: 300 psig
• Maximum outlet pressure: 30 psig
• Safety test pressure: 1.5 x Maximum inlet pressure
• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)
• Inboard leakage: 0.5 x 10-9 atm cc/sec He
• Outboard leakage: 1 x 10-9 atm cc/sec He
• Leakage across seat: 4 x 10-8 atm cc/sec He
• Maximum Cv: 0.054
• Weight: 3.8 lb
EX: U53SL |
G |
K – |
G |
L |
K – |
91 – 91 – |
Options |
Series |
Ports |
Seat |
Inlet Pressure Range |
Outlet Pressure Range |
Gauge |
Inlet / Outlet Connections |
P: Panel Mounting |
U53SL |
A |
K: PCTFE |
G: 300 psi |
L: 0-30 psig |
K: Gauge |
90: 1/4” internal female FSR |
H: Hastelloy® Diaphragm |
B |
W: No Gauge |
91: 1/4” swivel female FSR |
|||||
G |
92: 1/4” swivel male FSR |
||||||
41: 1/4” weld stub |
U53SLAK-GLK-41-41-H
U53SLAK-GLK-91-91-H
U53SLAK-GLK-92-92-H
U53SLAK-GLK-90-90-H
U53SLAK-GLK-41-41-P
U53SLAK-GLK-91-91-P
U53SLAK-GLK-92-92-P
U53SLAK-GLK-90-90-P
U53SLAK-GLW-41-41-H
U53SLAK-GLW-91-91-H
U53SLAK-GLW-92-92-H
U53SLAK-GLW-90-90-H
U53SLAK-GLW-41-41-P
U53SLAK-GLW-91-91-P
U53SLAK-GLW-92-92-P
U53SLAK-GLW-90-90-P
U53SLBK-GLK-41-41-H
U53SLBK-GLK-91-91-H
U53SLBK-GLK-92-92-H
U53SLBK-GLK-90-90-H
U53SLBK-GLK-41-41-P
U53SLBK-GLK-91-91-P
U53SLBK-GLK-92-92-P
U53SLBK-GLK-90-90-P
U53SLBK-GLW-41-41-H
U53SLBK-GLW-91-91-H
U53SLBK-GLW-92-92-H
U53SLBK-GLW-90-90-H
U53SLBK-GLW-41-41-P
U53SLBK-GLW-91-91-P
U53SLBK-GLW-92-92-P
U53SLBK-GLW-90-90-P
U53SLGK-GLK-41-41-H
U53SLGK-GLK-91-91-H
U53SLGK-GLK-92-92-H
U53SLGK-GLK-90-90-H
U53SLGK-GLK-41-41-P
U53SLGK-GLK-91-91-P
U53SLGK-GLK-92-92-P
U53SLGK-GLK-90-90-P
U53SLGK-GLW-41-41-H
U53SLGK-GLW-91-91-H
U53SLGK-GLW-92-92-H
U53SLGK-GLW-90-90-H
U53SLGK-GLW-41-41-P
U53SLGK-GLW-91-91-P
U53SLGK-GLW-92-92-P
U53SLGK-GLW-90-90-P
Additional information
Weight | 3 kg |
---|---|
Series | U53SL |
Ports | A, B, G |
Seat | K |
Inlet Pressure | G |
Outlet Pressure | L |
Gauge | K, W |
Inlet/Outlet Connection | 41-41, 90-90, 91-91, 92-92 |
Option | H, P |
Related products
-
GENTEC – High Purity Single Stage Medium Flow Line Regulator R15SL Series
RM 0.00 Add to cart -
GENTEC – High Purity Single Stage Low Flow Regulator R21B Series
RM 0.00 Add to cart -
GENTEC – High Purity Single Stage Medium Flow Regulator R22B Series
RM 0.00 Add to cart -
GENTEC – High Purity Medium Flow General Purpose Regulator HP152T Series
RM 0.00 Add to cart