GENTEC – Ultra High Purity Single Stage Low Flow Regulator U53SL Series

RM 0.00

Clear

Description

GENTEC® U53SL Series Stainless Steel Regulator is a threadless, high purity Regulator with non-tied diaphragm design. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

 

Features

• Single-Stage Configuration

• Metal-to-Metal Seal

• 2” Pressure Gauge 

• Fully Internal Electropolished

• Cleaned, Assembled, and Packaged for High Purity Semiconductor Application

• Maximum inlet pressure: 300 psig

• Maximum outlet pressure: 30 psig

• Safety test pressure: 1.5 x Maximum inlet pressure

• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)

• Inboard leakage: 0.5 x 10-9 atm cc/sec He

• Outboard leakage: 1 x 10-9 atm cc/sec He

• Leakage across seat: 4 x 10-8 atm cc/sec He

• Maximum Cv: 0.054

• Weight: 3.8 lb

 

EX: U53SL

G

K –

G

L

K –

91 – 91 – 

Options

Series

Ports

Seat

Inlet Pressure Range

Outlet Pressure Range

Gauge

Inlet / Outlet Connections

P: Panel Mounting

U53SL

A

K: PCTFE

G: 300 psi

L: 0-30 psig

K: Gauge

90: 1/4” internal female FSR

H: Hastelloy® Diaphragm

B

W: No Gauge

91: 1/4” swivel female FSR

G

92: 1/4” swivel male FSR

41: 1/4” weld stub

U53SLAK-GLK-41-41-H

U53SLAK-GLK-91-91-H

U53SLAK-GLK-92-92-H

U53SLAK-GLK-90-90-H

U53SLAK-GLK-41-41-P

U53SLAK-GLK-91-91-P

U53SLAK-GLK-92-92-P

U53SLAK-GLK-90-90-P

 

U53SLAK-GLW-41-41-H

U53SLAK-GLW-91-91-H

U53SLAK-GLW-92-92-H

U53SLAK-GLW-90-90-H

U53SLAK-GLW-41-41-P

U53SLAK-GLW-91-91-P

U53SLAK-GLW-92-92-P

U53SLAK-GLW-90-90-P

 

U53SLBK-GLK-41-41-H

U53SLBK-GLK-91-91-H

U53SLBK-GLK-92-92-H

U53SLBK-GLK-90-90-H

U53SLBK-GLK-41-41-P

U53SLBK-GLK-91-91-P

U53SLBK-GLK-92-92-P

U53SLBK-GLK-90-90-P

 

U53SLBK-GLW-41-41-H

U53SLBK-GLW-91-91-H

U53SLBK-GLW-92-92-H

U53SLBK-GLW-90-90-H

U53SLBK-GLW-41-41-P

U53SLBK-GLW-91-91-P

U53SLBK-GLW-92-92-P

U53SLBK-GLW-90-90-P

 

U53SLGK-GLK-41-41-H

U53SLGK-GLK-91-91-H

U53SLGK-GLK-92-92-H

U53SLGK-GLK-90-90-H

U53SLGK-GLK-41-41-P

U53SLGK-GLK-91-91-P

U53SLGK-GLK-92-92-P

U53SLGK-GLK-90-90-P

 

U53SLGK-GLW-41-41-H

U53SLGK-GLW-91-91-H

U53SLGK-GLW-92-92-H

U53SLGK-GLW-90-90-H

U53SLGK-GLW-41-41-P

U53SLGK-GLW-91-91-P

U53SLGK-GLW-92-92-P

U53SLGK-GLW-90-90-P

 

 

Additional information

Weight 3 kg
Series

U53SL

Ports

A, B, G

Seat

K

Inlet Pressure

G

Outlet Pressure

L

Gauge

K, W

Inlet/Outlet Connection

41-41, 90-90, 91-91, 92-92

Option

H, P